WAFER MARKING ALIGNMENT INSPECTION SYSTEM
Model : WMA-1000S
It automatically loads wafer and inspects wafer die marking
alignment and shift.
· Supports auto calibration function using software
· Shows the merged image of wafer and backside
marking on dies
· Auto wafer pre-align with notch finder camera
· Uses minimizer to alleviate wafer warpage
· Applies to 8”, 12” Wafer
· Minimizer is equipped with fluorine pad to prevent
any damage of wafer surface
X