WAFER SORTER & INSPECTION SYSTEM
Model :GWSI-2000S
· Performs two functions: wafer classification and inspection
· Having three sets of In & Out ports enables various wafer sorting task and
allows operators to secure time for other process tasks
· Increasing WPH(Wafer Per Hour) by performing wafer alignment, ID recognition
and defect inspection in one location
· Automatically uploading wafer inspection and classification information to
The production server
· Load Port Module 6x (LPM Quantity can be selected by user)
· Wafer Transfer Robot (Dual Arm Type)
· Pre-Aligner (Wafer Notch Detection and Alignment)
· OCR ID Reader (CONGNEX IS1740 Series Reader)
· Inspection Camera (25M High Resolution Area Camera)
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